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Bubblers

SAFC Hitech - Silicon Semiconductor
Ampoule design and fabrication

Bubbler in HatchBy having a complete understanding of the behavior of a chemical SAFC Hitech designs bubblers/ampoules to provide the maximum available output. Various designs are evaluated for a given material as a function of temperature, flow rates, and pressure. The ampoule life measurements enable us to maximize the efficieny of an ampoule for a specific process. We work closely with the end users to simulate their process conditions and understand the transport of materials in the process chamber.

Designed in-house to meet customer needs as well as international safety and industry standards, bubbler/ampoules are tested and prepared to the highest quality prior to filling with ultra-pure chemicals.


High-performance stainless steel containers
for semiconductor precursors

 Bubbler/ampoule design attributes:

316 L stainless steel for the entire assembly

Standard VCR connections

High-purity, re-serviceable, packless diaphragm valves

Working pressures to meet DOT, ADR and IMO regulations

Dimensions to suit customer equipment - custom engineering upon request

A variety of dip legs to provide constant saturation